There are a variety of models available depending on the application.  Material of construction includes 316L stainless steel, Hastelloy, Brass, Nickel and other exotic metals.  Internal construction can be packed, diaphragm packless or tied-diaphragm and can be actuated by either a standard type handwheel or via a pneumatic actuator.  Ultra low leak rates of 1 x 10^-9 cc/sec/he can be achieved on most models.  Internal finishes can be highly polished for super critical gases and electropolishing is available.  Valves are available with a number of different international inlets and outlets as well as the DISS series of ultra high integrity connections.

G55 Series - Brass diaphragm valve for specialty gas applications

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55L Series - Stainless steel diaphragm valve for specialty gas and semiconductor gases

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EGV Series - Tied diaphragm valve for ultra high purity and corrosive gases

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For more information on Thermo Specialty Gas and Semiconductor Valves, please contact:
   Thermo Gas Products
   tel: 707 528-4940
   fax: 707 581-1875
   email: sales@thermogp.com